Spin Coater
Vacuum Chuck Spin Coater
500-6000 Rpm, 8" Wafer Max, Programmable
Model Number: VTC 200
Compliance: CE Certified
Warranty: One Year. With lifetime support
Delivery time: 3-5 weeks in Europe
Structure & main components
· Aluminum casting case
· Vaccum pump
· Drainage outlet and vacuum pump connector on back panel
· One filter for preventing waste water from flowing into the pump
Chamber & Vacuum Chuck
· Chamber diameter is 250 mm, and can accept wafer 8" Dia max. or 5"x5" square
· Spinning chamber is made of PP which is corrosive resistant
· One 6" vacuum chuck and chuck o-ring are included for holding 6" and 8" wafers
· 1 piece of Adhesive tape (6'' W x 24'' L) is included for coating irregularly shaped substrates or wafer with size < 6
Spin Speed
· Digital control panel with two programmable segments of different spin times and speeds
· 500 - 6000 RPM adjustable spinning speed for each segment
Liquid Injecting
· 20mL syringe is used to contain the coating material
· The syringe holder height can be adjusted and rotated freely along the support rod
Input Power
· AC 110V/220V selectable
· There is a built in power socket on the right side of the VTC-200 spin coater. It is used to supply power for the vacuum pump. The output voltage of this power supply depends on the input voltage of the spin coater's main circuit. (e.g. if the spin coater is plugged into the AC 110V power socket, then the built in power socket will supply AC 110V)
Motor Power
· 90VDC , 150W
Dimensions
· 500mm(L) x 400mm(D) x 400mm(H)
Net Weight
· 20 kg (44 lbs)
Compliance
· CE Certified
Warranty
· One year limited with lifetime support
· Rusting and damage due to improper storage condition or maintenance are not covered by warranty
Options:
1. Precision Electronic Single Channel Pipette: 20 - 200uL for more accurate coating
2. 200°C 20ml Heatable Glass Syringe with Temperature Control Unit for Spin Coater
3. Heating cover with digital temperature controller up to 100°C, which allows sample drying in-situ during and after coating.
