Al2O3 / AlN / BN / SiC / ZrO2
Standard + Kundenspezifisch
Al2O3 / AlN / BN / SiC / ZrO2
Spherical / Nano / Surface modified
Apparatebau / Kleinserien
Laborware / Halbzeuge
2" / 3" / 100mm / 125mm / 150mm
Prime / Test / Monitor / Dummy
100 - 2000 µm
Single Side Polished / Double Side Polished